STS CPX Pegasus Etch System
Manufacturer: STS(KLA Corporation)
Model: CPX Pegasus
Wafer Size: 200mm
Vintage: 2006
Tool Condition: Refurbished ' Excellent condition
Chamber Qty: 2 Chambers
Volts / Hz/Ph: 380 Volts/60Hz ,160 Amps/phase
STS CPX Pegasus Etch System
EQUIPMENT DATASHEET
C4F8 Flow rate, ±2 % vibration (Analogy MFC 400 sccm)
SF6 Flow rate, ±2 % vibration (Analogy MFC 1200 sccm)
Ar Flow rate, ±2 % vibration (Analogy MFC 500 sccm)
O2 Flow rate, ±2 % vibration (Analogy MFC 200 sccm)
Chuck He Pressure, ±2 % vibration
Pressure: a. PM Pumpdown 500m Torr
APC valve open
b. LL Pumpdown
Pressure 80m Torr
Gate valve open
Temperature, ±2 C vibration
Forward power, ±1% vibration
Ref power, ±1% vibration
Gases:
. SF6 : Purity 99.999%(5N)
. C4F8 : Purity 99.999%(5N)
. 02 : Purity 99.9995%(5N5)
. N2 : Purity 99.9995%(5N5)
. Ar : Purity 99.9995%(5N5)
LAM RESEARCH 9600 TCP
EQUIPMENT DATASHEET
MODEL: LAM RESEARCH 9600 TCP METAL ETCH SYSTEM
MOUNTING: BULKHEAD MOUNT
WAFER SIZE: 200 MM
SOFTWARE: ENVISION 1.52
INDEXERS: HINE
CLAMPING: ESC (NEW)
BACKSIDE HELIUM: CLOSED LOOP
GENERATOR: New TRUPLASMA RF generators
RF MATCH: UPPER TCP, LOWER MINI MATCH, DSQ MATCH
TURBO: ADIXEN/ALCATEL 1300 (NEW)
TURBO CONTROLLER: ADIXEN (NEW)
VAT GATE: VAT 65 (NEW)
VAT CONTROLLER: PM-7 (NEW)
ENDPOINT: DUAL ENDPOINT 703 nm AND 520nm
DSQ: HINGED
WVDS: AUTO FILL
APM: STANDARD
MFCS: Brooks GF125
Centura HDP System
EQUIPMENT DATASHEET
Centura DCVD System - Applied Materials
Manufacturer: Applied Materials
Model: Centura DCVD
Year of Construction: 2000
System Number: 300452
Wafer Size: 200mm.
Wafer Shape: SNNF
turbo pump: ebara memt 1600
Chamber Type:
Pos (A) Ultima HDP+
Pos (B) Ultima HDP+
Pos (C) Ultima HDP+
Pos (D) EMPTY
Pos (E) (MC) Multislot Cooldown
pos (f) (oa) orienter
GATE VALVE
Gas Panel Type HP 10 RA MAX
Gas Panel Doors SAFETY WIRED GLASS
Cabinet Exhaust BOTTOM EXHAUST
Single Line Drop YES
Loadlock Type WIDE BODY LOADLOCK
Cassette Type Supported UNIVERSAL
Wafer Out of Cassette Sensor NOT AVAILABLE
Auto Rotation YES
Chamber N2 Regulation REGULATED
Mainframe N2 Regulation REGULATED 30PSI He Regulation REGULATED
Remote Options
System Controller : DCVD Controller GFCI 100MA GFCI
Controller UPS NONE
Cntrlr Electrical Interface CONTROLLER TOP FEED AC CABLES
Controller Cover NONE
Controller Exhaust CONTROLLER TOP EXHAUST
Generator Rack Options
Ch A RF Generator 1 ACME
Ch B RF Generator 1 ACME
Ch C RF Generator 1 ACME
Ch D RF Generator 1 NOT APPLICABLE
RF On Indicator Interface NOT AVAILABLE Gen Rack Cooling Water NOT AVAILABLE RF Gen Rack Mnfld Fac H2O Conn NOT APPLICABLE
RF Gen Rack Mnfld Gen H2O Conn NOT APPLICABLE
Ultima Gen Skins YES
Ultima Gen Rack H2O Conn SST QDISC
Ultima RF On Indicator NO