Thermal Division | Heat Exchangers for Semiconductor Applications
Our Thermal Division focuses on advanced heat exchanger solutions designed to manage heat in high-performance semiconductor applications. Efficient thermal management is critical to reliability, efficiency, and long-term system stability.
OS-3060
Dual-channel chiller designed for 200 mm and 300 mm semiconductor tools, offering precise low-temperature control, compact footprint, and broad interface compatibility.
NEW
GT-20GS
Single-channel chiller for 200 mm and 300 mm semiconductor tools, delivering compact, low-temperature cooling with multi-interface compatibility.
NEW
GT-40GS
Single-channel chiller for 200 mm and 300 mm semiconductor tools, offering compact, low-temperature cooling with broad interface compatibility.
NEW
GT-R60
Single-channel chiller for 200 mm and 300 mm semiconductor tools, offering stable low-temperature performance and flexible system integration.
