OZONE Generators
One Semiconductor offers specialized overhaul services for Ozone Generator units critical to wafer cleaning, surface preparation, and advanced oxidation processes. Our process ensures restored performance, extended equipment lifespan, and minimized downtime.
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Complete disassembly and decontamination of internal modules
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Inspection and replacement of corroded or degraded components.
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Functional testing of power supply units and cooling systems
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Leak detection, flow calibration, and final performance verification
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Comprehensive service documentation and QA report
We support leading OEM model MKS®, and others. Trust our experienced team to deliver precision overhaul solutions that restore your Ozone Generator to optimal operating condition—efficiently and reliably.
Our Ozone Generator overhaul service includes:
Brand: MKS
Models:
AX8200A AX8200A-CER AX8200A-CE
AX8200D/E/F AX8403 AX8406
AX8407 AX8560-7100
