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Brand:  MKS

Models: 

  • Smart Power FI20160

  • Smart Match FI20045, FI10001, FI20606

  • MW GeneratorAX2115, S15ITBC

  • Magnetron Head 1.5KW, 3KW, 3.5KW

At One Semiconductor, we specialize in the complete refurbishment of Microwave Systems used in plasma generation and advanced process modules. Our services restore performance and reliability across a wide range of system configurations.

Our Microwave System overhaul service includes:
  • Full disassembly and inspection of waveguides, couplers, and isolators

  • Cleaning and tuning of magnetrons, circulators, and arc detectors

  • Replacement of damaged seals, connectors, and high-voltage cables

  • Power supply calibration and arc fault protection testing

  • Functional validation of RF output stability and system matching

  • Detailed final report with test results and service recommendations

We service components from top manufacturers as MKS®, ensuring your microwave system is operating at peak efficiency for reliable plasma generation.

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Microwave System

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