Orienter Kit

Components:

High precision lasermicrometer with mounting brackets, dust covers, and cables.

Drop In replacement utilizing previous mounting holes

A microcontroller-based PCB that controls the stepper motor, reads the laser-micrometer, calculates the wafer orientation and position, communicates with the system controller, and provides a graphical user interface via an LCD.

Features:

▪ High accuracy and repeatability

▪ Fast measurement speed

▪ Non-contact and non-destructive measurement method

▪ Suitable for use in clean room and high vacuum environments

▪ Chamber viewport imperfections are compensated for via calibration during installation

▪ Easy to use and integrate into existing manufacturing processes

▪ Customer configurable via touch GUI settings screen

▪ Dust covers to ensure repeatable accurate orientations

▪ Wafer size: 150mm and 200mm in diameter

▪ Supports different substrates: silicon, quartz, glass, sapphire, and silicon carbide

▪ Supports different wafer shapes: SNNF, JMF, and SMF

▪ Plug and play compatible with OEM stepper motor and connectors

▪ Easy troubleshooting and debugging via GUI

PROPIERATARY ORIENTING SOLUTION BY ONE SEMICONDUCTOR FOR ENDURA AND CENTURA PLATFORMS

The optical wafer orientation system is designed to accurately determine the orientation of semiconductor wafers during manufacturing processes, which is crucial for ensuring precise alignment within process chambers.