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Upgrades, Retrofits and Rebuild Kits

One Semiconductor provides upgrades and retrofits to improve performance.

200mm PVD Source Rotation Upgrade with Digital Display for RPM

  • Drop-in replacement that addresses obsolescence issue of rotation motor and driver.

  • Allows equipment engineer to adjust the rotation of the motor to the single RPM allowing another knob for process tuning.

Ultima HDP Sub-Assembly Offerings

  • Cathode Oring Kit

  • Applicator Oring Kit

  • Cathode

  • ESC

RAID Hard Drive Upgrade

Drop-in replacement for the following hard drives:

  • AMAT Legacy

  • AMAT GEM / HSMS

  • LAM 9600 NextStep Operating systems (SCSI and IDE)

  • Hitachi Furnaces

Load Lock Cylinder Replacement

  • 1 Year Warranty

Ready to upgrade your system? Contact our sales team today. 

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