OS-3060
- OS-3060 is designed to meet 200mm and 300mm
OEM tool specifications
Dual Channel Chiller
Low temperature
Coolant Galden, Fluorinert or DI/EG
User friendly touch panel display
Small foot print
Multiple interfaces selectable
Condition:
NEW
Applicable Tools
Rainbow 4400/4420 - 200 mm
Rainbow 4500/4520 - 200 mm
Rainbow 4600 - 200 mm
Rainbow 4700 - 200 mm
Channel 1
-20~+90℃±0.1C(@Constant Heat Load)
Pt100 PID control
Galden / Fluorinert
Temp. range
Temp. accuracy
Temp. controller
Heat medium
Channel 2
-20~+90℃
±0.1 ℃(@Constant Heat Load)
Pt100 PID control
Galden/Fluorinert;DI/EG
Channel 1
3kW(@+20℃)
R410A
Plate type heat exchanger
Water type
Cooling capacity
Freon gas
Heat exchanger
Condenser
Channel 2
6kW(@+20℃)
R410A
Plate type heat exchanger
Water type
Channel 1
3kW
Capacity
Channel 2
6kW
Channel 1
Magnetic coupling pump
1.5kW
20L/min@0.5MPa
Pump unit
Motor
Capacity
Channel 2
Magnetic coupling pump
1.5kW
20L/min@0.5MPa
Channel 1
High/Low temp.
Empty protection
Low level
Pump overload
Pump pressure
Low flow alarm
Water leak
Sensor protection
Refrigerator overload
Refrigerator pressure
Emergency stop
Circuit breaker
Thermostat
Float switch
Float switch
Motor breaker
Pressure sensor
Flow meter
Float switch
Abnormal sensor diagnosing
Motor breaker
Pressure switch
EMO switch
Over-current breaker
Channel 2
High temp.
Heater over load
Empty protection
Low level
Pump overload
Pump pressure
Low flow alarm
Water leak
Sensor protection
Refrigerator overload
Refrigerator pressure
Channel 1
3/4" Compression fitting
3/4" Compression fitting
Rc1/2
Rc1/2
Coolant inlet
Coolant outlet
Facility Water inlet
Facility Water outlet
Channel 2
3/4" Compression fitting
3/4" Compression fitting
Channel 1
- Approx 20L
LAMAnalog,LonWorks,AMAT-CHX,Neslab,Devicenet selectable
W:485xD:675xH:1150mm
3-phase 208VAC±10% 32A
Reservoir tank+Heater tank
Interface
Outer dimensions
Power supply
Channel 2
- Approx 15L
LAM-Analog,LonWorks; AMAT-CHX,Devicenet;TEL-SCCM
W:560xD:960xH:1550mm
3-phase 208VAC±10% 50A