OS-20DS
- Designed to meet 200mm and 300mm OEM tool specifications
Single Channel Chiller, coolant DI/EG
Low temperature
User friendly touch panel display
Small foot print
Multiple interfaces selectable (LAM Analog; AMAT 0/1; AMAT-CHX; Neslab; Shibaura)
Condition:
NEW
Install Base:
OS-20DS
Description:
Designed to meet 200mm and 300mm OEM tool specifications
Single Channel Chiller, coolant DI/EG
Low temperature
User friendly touch panel display
Small foot print
Multiple interfaces selectable (LAM Analog; AMAT 0/1; AMAT-CHX; Neslab; Shibaura)
Condition
NEW
Platform
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47, CE mark; EN61000-6-2; EN61000-6-4; EN ISO12100; EN60204-33; Certified
Aplicable Tools
TCP 9100
Alliance 9100
Alliance 9400
Alliance 9600
Alliance Exelan
Varian Vista HCS
Shibaura CDE-200 / 300
Concept Two — Sequel
Concept Two — Vector
Temp control CH1
-20~+80°C
±0.1°C (@Constant Heat Load)
Pt100 PID control
Temp control CH2
Refrigerator CH1
Plate type heat exchanger
Water type
Refrigerator CH2
Heater CH1
3kW
Heater CH2
Pump CH1
All stainless pump
1.6kW
20L/min@0.5MPa
Pomp CH2
Safety Device Ch1
Thermostat
Float switch
Float switch
Motor breaker
Pressure sensor
Flow meter
Float switch
Abnormal sensor diagnosing
Motor breaker
Pressure switch
EMO switch
Over-current breaker
Safety Device Ch2
Piping Conection Ch1
Rc3/4"
Rc3/4"
Rc1/2"
Rc1/2"
Rc1/2"
Piping Conection Ch2
General Ch1
Approx 20L
LAM Analog; AMAT 0/1; AMAT-CHX; Neslab; Shibaura selectable
W:485xD:675xH:1150mm
3-phase 208V±10% 32A
General Ch2