OS-20GS
- OS-20GS is designed to meet 200mm and 300mm
OEM tool specifications
Single Channel Chiller
Low temperature dual coolant compatible
Galden/Fluorinert
User friendly touch panel display
Small foot print
Multiple interfaces selectable
(LAM Analog,LonWorks,AMAT-CHX,Neslab,Devicenet)
Condition:
NEW
Install Base:
381
OS-20GS
Description:
OS-20GS is designed to meet 200mm and 300mm
OEM tool specifications
Single Channel Chiller
Low temperature dual coolant compatible
Galden/Fluorinert
User friendly touch panel display
Small foot print
Multiple interfaces selectable
(LAM Analog,LonWorks,AMAT-CHX,Neslab,Devicenet)
Condition
NEW
Platform
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47, CE mark; EN61000-6-2; EN61000-6-4; EN ISO12100; EN60204-33; Certified
Aplicable Tools
2300 Kiyo 45
2300 Versys Metal
2300 Exelan Flex 45
Mattson Aspen 3 (HL)
Temp control CH1
-20~+90°C
±0.1°C (@Constant Heat Load)
Pt100 PID control
Galden / Fluorinert
Temp control CH2
Refrigerator CH1
4HP
R404a
2kW (@-10°C)
Plate type heat exchanger
Water type
Refrigerator CH2
Heater CH1
3kW
Heater CH2
Pump CH1
Magnetic coupling pump
1.5kW
20L/min@0.5MPa
Pomp CH2
Safety Device Ch1
Thermostat
Float switch
Float switch
Motor breaker
Pressure sensor
Flow meter
Float switch
Abnormal sensor diagnosing
Motor breaker
Pressure switch
EMO switch
Over-current breaker
Safety Device Ch2
Piping Conection Ch1
3/4" Compression fitting
3/4" Compression fitting
Rc1/2
Rc1/2
Piping Conection Ch2
General Ch1
Approx 20L
LAM Analog,LonWorks,AMAT-CHX,Neslab,Devicenet selectable
W:485xD:675xH:1150mm
3-phase 208VAC±10% 32A
General Ch2