OS-3060
- OS-3060 is designed to meet 200mm and 300mm
OEM tool specifications
Dual Channel Chiller
Low temperature
Coolant Galden, Fluorinert or DI/EG
User friendly touch panel display
Small foot print
Multiple interfaces selectable
Condition:
NEW
Install Base:
696
OS-3060
Description:
OS-3060 is designed to meet 200mm and 300mm
OEM tool specifications
Dual Channel Chiller
Low temperature
Coolant Galden, Fluorinert or DI/EG
User friendly touch panel display
Small foot print
Multiple interfaces selectable
Condition
NEW
Platform
(LAM Analog,LonWorks;AMAT-CHX,Devicenet)
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,
S14-0309,S22-0712a, F47, CE mark;
EN61000-6-2;EN61000-6-4;
EN ISO12100 ;EN60204-33; Certified
Aplicable Tools
Rainbow 4400 / 4420
Rainbow 4500 / 4520
Rainbow 4600
Rainbow 4700
Super E
EMAX - 200 mm
EMAX - 300 mm
DPS Metal
DPS Poly
DPS II Metal
DPS II Poly
Centura WXZ
Temp control CH1
'-20~+90℃±0.1C(@Constant Heat Load)
Pt100 PID control
Galden / Fluorinert
Temp control CH2
'-20~+90℃
±0.1℃(@Constant Heat Load)
Pt100 PID control
Galden/Fluorinert;DI/EG
Refrigerator CH1
3kW(@+20℃)
R410A
Plate type heat exchanger
Water type
Refrigerator CH2
6kW(@+20℃)
R410A
Plate type heat exchanger
Water type
Heater CH1
3kW
Heater CH2
6kW
Pump CH1
Magnetic coupling pump
1.5kW
20L/min@0.5MPa
Pomp CH2
Magnetic coupling pump
1.5kW
20L/min@0.5MPa
Safety Device Ch1
High/Low temp.
Empty protection
Low level
Pump overload
Pump pressure
Low flow alarm
Water leak
Sensor protection
Refrigerator overload
Refrigerator pressure
Emergency stop
Circuit breaker
Thermostat
Float switch
Float switch
Motor breaker
Pressure sensor
Flow meter
Float switch
Abnormal sensor diagnosing
Motor breaker
Pressure switch
EMO switch
Over-current breaker
Safety Device Ch2
High temp.
Heater over load
Empty protection
Low level
Pump overload
Pump pressure
Low flow alarm
Water leak
Sensor protection
Refrigerator overload
Refrigerator pressure
Piping Conection Ch1
3/4" Compression fitting
3/4" Compression fitting
Rc1/2
Rc1/2
Piping Conection Ch2
3/4" Compression fitting
3/4" Compression fitting
General Ch1
Approx 20L
LAMAnalog,LonWorks,AMAT-CHX,Neslab,Devicenet selectable
W:485xD:675xH:1150mm
3-phase 208VAC±10% 32A
General Ch2
Approx 15L
LAM-Analog,LonWorks; AMAT-CHX,Devicenet;TEL-SCCM
W:560xD:960xH:1550mm
3-phase 208VAC±10% 50A