OS-C2020
- OS-C2020 is designed to meet 200mm and 300mm
OEM tool specifications
Dual Channel Chiller
Low temperature dual coolant compatible
Galden/Fluorinert
User friendly touch panel display
Small foot print
Interfaces for TEL 200mm and 300mm
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,
S14-0309,S22-0712a, F47, CE mark;
EN61000-6-2;EN61000-6-4;
EN ISO12100;EN60204-33; Certified
Condition:
NEW
Install Base:
OS-C2020
Description:
OS-C2020 is designed to meet 200mm and 300mm
OEM tool specifications
Dual Channel Chiller
Low temperature dual coolant compatible
Galden/Fluorinert
User friendly touch panel display
Small foot print
Interfaces for TEL 200mm and 300mm
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,
S14-0309,S22-0712a, F47, CE mark;
EN61000-6-2;EN61000-6-4;
EN ISO12100;EN60204-33; Certified
Condition
NEW
Platform
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113, S14-0309,S22-0712a, F47, CE mark; EN61000-6-2;EN61000-6-4; EN ISO12100;EN60204-33; Certified
Aplicable Tools
TEL SCCM, DRM (200 mm)
TEL SCCM (300 mm)
TEL LK2 (300 mm)
Temp control CH1
-10~+60°C
±0.1°C (@Constant Heat Load)
PT100 PID control
FC-3283
Temp control CH2
+30~+160°C
±0.1°C (@Constant Heat Load)
PT100 PID control
FC-40/FC-3283/HT200
Refrigerator CH1
2.2kW (inverter drive)
4.5kW (@-10°C)
R404a
Plate type heat exchanger
Water type
>20L/min (@20°C 0.4MPa) (@ch1:-10°C; ch2:30°C)
Refrigerator CH2
n/a
4kW (@30°C)
n/a
Plate type heat exchanger
Water type
>20L/min (@20°C 0.4MPa) (@ch1:-10°C; ch2:30°C)
Heater CH1
4kW
Heater CH2
3kW
Pump CH1
Magnetic coupling pump
2.2kW
30L/min@0.5MPa
Pomp CH2
Magnetic coupling pump
1.5kW
20L/min@0.4MPa
Safety Device Ch1
Thermostat
Circuit Breaker
Float switch
Float switch
Motor breaker
Pressure sensor
Float switch
Abnormal sensor diagnosing
Motor breaker
Pressure switch
EMO switch
Over-current breaker
Safety Device Ch2
Thermostat
Circuit Breaker
Float switch
Float switch
Motor breaker
Pressure sensor
Float switch
Abnormal sensor diagnosing
Motor breaker
Pressure switch
EMO switch
Over-current breaker
Piping Conection Ch1
3/4" Compression fitting
3/4" Compression fitting
Rc3/4
Rc3/4
Rc1/2
1/4" Compression fitting & speed control
1/4" quick connector
Piping Conection Ch2
3/4" Compression fitting
3/4" Compression fitting
Rc1/2
1/4" Compression fitting & speed control
1/4" quick connector
General Ch1
15L
TEL-SCCM, LK2
3507778-1 *2; EMO short switch *1; EMO block removeable
W:560xD:960xH:1550mm
208VAC±10% 50A 3-phase, DDK MS3102A-22-17-P
General Ch2
15L
TEL-SCCM, LK2
3507778-1 *2; EMO short switch *1; EMO block removeable
W:560xD:960xH:1550mm
208VAC±10% 50A 3-phase, DDK MS3102A-22-17-P