OS-F20DS
- Designed to meet implantation OEM tool specifications
Air cooled single Channel Chiller
User friendly touch panel display
Small footprint
Condition:
NEW
Install Base:
OS-F20DS
Description:
Designed to meet implantation OEM tool specifications
Air cooled single Channel Chiller
User friendly touch panel display
Small footprint
Condition
NEW
Platform
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113, S14-0309,S22-0712a, F47, CE mark; EN61000-6-2;EN61000-6-4; EN ISO12100;EN60204-33; Certified
Aplicable Tools
Temp control CH1
+5~+40°C
±0.5°C (@Constant Heat Load)
PT-100Ω PID control
DI/EG
Temp control CH2
Refrigerator CH1
1.5HP
2.5kW (@20°C) (Ambient temp. 16°C)
R-134a
Plate type heat exchanger
Air type
1.5kW
Refrigerator CH2
Heater CH1
Heater CH2
Pump CH1
Centrifugal Pump
0.75kW (50Hz)
15 liter/min at 0.2MPa (50Hz)
1.5kW (50Hz)
Pomp CH2
Safety Device Ch1
Thermostat
Float switch
Float switch
Thermal relay
Pressure switch
Flow switch
Abnormal sensor diagnosing
Thermal relay
Pressure switch
EMO switch
Over-current breaker
Safety Device Ch2
Piping Conection Ch1
Rc1/2
Rc1/2
Piping Conection Ch2
General Ch1
4L
follow affinity 25pin
W:440xD:650xH:797mm
100Kg
208VAC 10A 3-phase
General Ch2