OS-MD1010G
- Designed to meet Endura 5500 copper process specifications
Dual Channel Chiller
Low temperature operation
Dual coolant compatible Galden/Fluorinert
User friendly touch panel display
Small foot print
AMAT-CHX interface
Condition:
NEW
Install Base:
OS-MD1010G
Description:
Designed to meet Endura 5500 copper process specifications
Dual Channel Chiller
Low temperature operation
Dual coolant compatible Galden/Fluorinert
User friendly touch panel display
Small foot print
AMAT-CHX interface
Condition
NEW
Platform
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47, CE mark; EN61000-6-2; EN61000-6-4; EN ISO12100; EN60204-33; Certified
Aplicable Tools
Ultima X
Temp control CH1
-40~+60°C
±0.1°C (@Constant Heat Load)
Pt100 PID control
Galden
Temp control CH2
-40~+60°C
±0.1°C (@Constant Heat Load)
Pt100 PID control
Galden
Refrigerator CH1
1kW (@-40°C)
R410A
Plate type heat exchanger
Water type
Refrigerator CH2
1kW (@-40°C)
R410A
Plate type heat exchanger
Water type
Heater CH1
2kW
Heater CH2
2kW
Pump CH1
Magnetic coupling pump
1.5kW
20L/min@0.5MPa
Pomp CH2
Magnetic coupling pump
1.5kW
20L/min@0.5MPa
Safety Device Ch1
High temp.
Heater over load
Empty protection
Low level
Pump overload
Pump pressure
Low flow alarm
Water leak
Sensor protection
Refrigerator overload
Refrigerator pressure
Emergency stop
Circuit breaker
Safety Device Ch2
High temp.
Heater over load
Empty protection
Low level
Pump overload
Pump pressure
Low flow alarm
Water leak
Sensor protection
Refrigerator overload
Refrigerator pressure
Piping Conection Ch1
3/4" Compression fitting
3/4" Compression fitting
Rc3/4"
Rc3/4"
Piping Conection Ch2
3/4" Compression fitting
3/4" Compression fitting
General Ch1
Approx 10L
AMAT-CHX
W:560xD:960xH:1555mm
3-phase 208VAC±10% 63A
General Ch2
Approx 10L