OS-R60D
- Designed to meet 200mm and 300mm OEM tool specifications
Single Channel heat exchanger
High temperature
DI/EG; Galden/Fluorinert selectable
User friendly touch panel display
Small foot print
Multiple interfaces selectable (LAM-Analog, LonWorks; AMAT0; AMAT1; AMAT-CHX; Devicenet)
Condition:
NEW
Install Base:
OS-R60D
Description:
Designed to meet 200mm and 300mm OEM tool specifications
Single Channel heat exchanger
High temperature
DI/EG; Galden/Fluorinert selectable
User friendly touch panel display
Small foot print
Multiple interfaces selectable (LAM-Analog, LonWorks; AMAT0; AMAT1; AMAT-CHX; Devicenet)
Condition
NEW
Platform
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47, CE mark; EN61000-6-2; EN61000-6-4; EN ISO12100; EN60204-33; Certified
Aplicable Tools
TCPSE 9400
TCPSE 9600
P5000 (based on chamber specs)
Producer DXZ
Producer SE / GT
Concept One
Concept Two — Speed
Concept Two — Altus
Concept Two — SOLA
Temp control CH1
Facility Water temperature +5°C~+100°C
±0.1°C (@Constant Heat Load)
Pt100 PID control
GALDEN, DI/EG
Temp control CH2
Refrigerator CH1
8kW @ Δt>8°C
Plate type heat exchanger
Refrigerator CH2
Heater CH1
6kW
Heater CH2
Pump CH1
All stainless pump
1.1kW
30L/min @ 0.5MPa
Pomp CH2
Safety Device Ch1
Safety Device Ch2
Piping Conection Ch1
3/4"
3/4"
1/2"
1/2"
1/2"
Piping Conection Ch2
General Ch1
Approx 30L
LAM-Analog, LonWorks; AMAT0; AMAT1; AMAT-CHX; Devicenet
W:380xD:665xH:860mm
3-phase 208VAC±10% 32A
General Ch2