OS-S40KD
- Designed to meet 200mm and 300mm OEM tool specifications
Multiple channel heat exchanger
High temperature, coolant DI/EG
User friendly touch panel display
Small foot print
Interface for AMAT Ultima HDP (AMAT-CHX; Devicenet)
Condition:
NEW
Install Base:
OS-S40KD
Description:
Designed to meet 200mm and 300mm OEM tool specifications
Multiple channel heat exchanger
High temperature, coolant DI/EG
User friendly touch panel display
Small foot print
Interface for AMAT Ultima HDP (AMAT-CHX; Devicenet)
Condition
NEW
Platform
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47, CE mark; EN61000-6-2; EN61000-6-4; EN ISO12100; EN60204-33; Certified
Aplicable Tools
Ultima HDP
Temp control CH1
Facility Water temperature +5°C~+90°C
±1°C (@Constant Heat Load)
Pt100 PID control
DI/EG
Temp control CH2
Refrigerator CH1
40kW @ Δt>40°C
Plate type heat exchanger
Refrigerator CH2
Heater CH1
15kW
Heater CH2
Pump CH1
All stainless pump
2.2kW
≥50L/min@0.5MPa
Pomp CH2
Safety Device Ch1
Thermostat
Circuit breaker
Float switch
Float switch
Motor breaker
Pressure sensor
Float switch
Abnormal sensor diagnosing
EMO switch
Over-current breaker
Safety Device Ch2
Piping Conection Ch1
3/4" ×4 quick connector
3/4" ×4 quick connector
Rc1"
Rc1"
1/2"
Piping Conection Ch2
General Ch1
Approx 26L
AMAT-CHX; Devicenet
W:560xD:960xH:1090mm
3-phase 208VAC±10% 60A
General Ch2